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atomic force microscope
Atomic Force Microscopy (AFM) is a high-precision scanning analysis technique that utilizes the force between a measuring probe and a sample to perfor
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原子力显微镜

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Atomic Force Microscopy for Measurement in the Semiconductor Industry

X. Y measurement range: 20umX20um; 40umX40um; 80umX80um

Z measurement range: 2um 4um 6um

X. Y resolution: 0.1nm

Z resolution: 0.01nm

atomic force microscope(AFM)Through a tiny size

Precision tip on cantilever for surface scanning of sample
Sharp tip and sample surfaceInteratomicThe interaction force will cause
The cantilever position has slightly deviated, and thencoverPressure resistance
The component detects the change and is measured accordinglyBased on
This impact,AFMCan achieve high resolutionmeasure
Surface morphology and roughness belong to non-destructive measurement
AFMDifferent operating modes can be used, therefore
To study more performance,For example, the static electricity of the sample
Force, magnetism, or elasticity.
Features:
Measurement performance
high resolutionSurface morphology measurement
The pointed end automatically approaches the surface of the tested sample
Sample surface sampling passedPiezoresistive sensing element
Contact measurement mode, non-contact measurement mode
Measurement of electrostatic and magnetic characteristics
measurement of electrical and magnetic properties,
Measurement of lateral force and elasticitylateral forces and elasticity*1
Liquid measurementmeasurement in liquids*2
More operational modes to choose from
*1 contact mode in basic version, additional modes upon request
*2 optional
Atomic Force Microscopy
Surface CharacterizationSurface characteristics
Very High ResolutionsExtremely high resolution

Typical applications:
Quality assurance of micro industrial technology
nanometerSub nanometer levelRoughnessmeasure
Surface measurement of silicon wafers and optical devicesrange
Surface characteristics of biological specimens
Nano structure measurement
Research on Surface Characteristics of Medical Samplesmedical samples,
e.g. protheses, catheters or stents
Applied to the detection of rubber bands in materials science,Magnetic workpieces, etc

AFM measuring head
Measuring head
control unitControl devices; The sensor is installed on the electric platform
sensor mount with motor-driven z-stage
software, operating manualMeasurement software operation manual
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